MEMS Wafer Photoresist Ultrasonic Spraying
MEMS Wafer Photoresist Ultrasonic Spraying MEMS Wafer Photoresist Ultrasonic Spraying - Cheersonic Over the past decade, photoresist coatings have been sprayed directly onto MEMS wafers and other 3D microstructures, and the advantages of spray deposition to 3D topography have been extensively studied. Compared with traditional spin coating, photoresist coating by ultrasonic spraying has advantages in depositing a more uniform coating, especially on top of the sidewalls of high aspect ratio [...]